Note: This is the 2023–2024 eCalendar. Update the year in your browser's URL bar for the most recent version of this page, or jump to the newest eCalendar.
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Overview
Mechanical Engineering : Introduction to microelectromechanical systems (MEMS). Micromachining techniques (thin-film deposition; lithography; etching; bonding). Microscale mechanical behaviour (deformation and fracture; residual stresses; adhesion; experimental techniques). Materials- and process-selection. Process integration. Design of microdevice components to meet specified performance and reliability targets using realistic manufacturing processes.
Terms: This course is not scheduled for the 2023-2024 academic year.
Instructors: There are no professors associated with this course for the 2023-2024 academic year.
