Physical Vapor Deposition
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E-beam Evaporator
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BJD 1800
Materials: Ti, Ag, Al, Ni, Cr, Au.... -
Angstrom Engineering-Nexdep
Materials: Al, Ge, Cu, Pt, Ti, Cr, Ni, Au...
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DC and RF Sputter
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Denton Explore
Materials: SiO₂, SiN, ITO, Ti, Cr, Mo, Zr, Au, Al, SiC... -
Angstrom Engineering-Amode
Materials: SiO₂, SiN, ITO, Ti, Cr, Mo, Zr, Au, Al, SiC...
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Chemical Vapor Deposition
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VECCO Fiji G2 (ALD)
Materials: TiO₂, Al2O3, SiO₂, HfO₂ -
AM5000 (PECVD)
Materials: SiO₂, Si3N4 -
SCS 200 (Parylene Coater)
Material: Parylene C, N