The McGill Nanotools - Microfab is a 150mm compatible lab. It is equipped with standard and specialized Micro and Nanofabrication equipments.
Lithography
- Contact Broadband UV
- Electron Beam Litho
- UV laser maskless direct write
- Thermal Probe AFM Lithography
Thin films
- LPCVD Nitride and PolySilicon
- Thermal Oxides
- Ebeam Evaporator
- DC and RF sputterer
- Spin and spray coater
- Atomic layer deposition
- Parylene coater
Etching
- DRIE
- RIE (HBr, Cl2, CF4, CHF3, SF6, O2, Ar...)
- ICP for III, IV (installing)
- XeF2 isotropic etch
- HF wet bench
- Acid/Base wet bench
- KOH/TMAH wet bench
- Solvent wet bench
Packaging and Assembly:
- Wafer bonder (Anodic, Direct, Adhesive Eutectic)
- Dicing saw
- Laminator
- WireBonder
Characterization
- Spectroscopic Ellipsometry
- White light interferometer
- Optical microscopes
- Reflectometers
- Stress measurement
- Sheet resistance
- Probe station
- Stylus Profilometer
- AFM
- SEM