Equipment

For our MEMS R&D we use

McGill’s Nanotools/Microfab. facilities

RF

• Agilent E5071C 4.5GHz Vector Network Analyzer
• Agilent 4440A 26.5GHz Spectrum Analyzer (with phase noise and noise figure personalities)
• Agilent 83712B 20GHz Signal Generator
• Agilent N8973A 3GHz Noise Figure Analyzer
• Agilent 346B Solid State Noise Source
• Anritsu MG3694B 40GHz Signal Generator
• Anritsu MG3700A 6GHz Vector Signal Generator
• Tektronix TDS8000 50GHz Digital Sampling Scope (3 channels)
• Focus Microwaves Programmable Tuners (Models 718 and 1816)
• Miteq 1-12GHz Low-Noise Amplifier

MEMS

• Alcatel AG81 Mini-TASK Vacuum Pump
• Custom-made 450 cubic-inch vacuum chamber

Microwave and MEMS Probing

• Cascade RF-1 Microwave Probe Station
• Cascade 40GHz ACP40-GSG-150, GSG-100, GS-150 Probes (4x)
• Cascade 40GHz ACP40-SGS-175 Differential Probes (2x)
• Cascade 101-190 Calibration Substrate