ISS Silicon Microfabrication Workshop - May 4-8, 2015

The ISS Program will be hosting a hands-on workshop on the Microfabrication of Silicon-Based MEMS Devices to be held at McGill University with a flexible schedule for hands-on components.

The 5-day workshop will be taught by Dr. Jun Li and Dr. Matthieu Nannini, Manager, McGill Nanotools Microfab Facilities, and Prof. Xinyu Liu and will introduce students to the methodologies and techniques used for desiging and microfabricating silicon based MEMS (micro-electromechanical systems) devices.


Workshop Summary

Silicon-based MEMS devices have found important applications in a large number of high-value sectors: aerospace and automotive transport, energy, customer electronics, communications, and medical devices. Motivated by such needs and opportunities, many academic institutions and industrial companies have invested enormous efforts on the research and development of integrated MEMS devices (both sensors and actuators) with superior functionalities, performance, and reliability. While translating design concepts into working prototypes, it is necessary to confront technological challenges in microfabrication process design, device packaging, and system integration. This course will introduce MEMS design and microfabrication methodologies, and provide hands-on experience in the NanoTools Microfabrication Facility.


This course should be of interest to students who intend to design and fabricate integrated MEMS platforms. During the week, students be assigned to one of Groups A-E based on availability and preference. Please see the schedule for more details: PDF icon microfabrication_schedule_may_2015.pdf


Labs: NanoTools Microfabrication Facility, Rm. 011 - Rutherford Physics Bldg. - 3600 University Street

Lectures: Classroom for lecture TBA.

Lunches: MIAM Office Conference Room - 6A/6C (Frank Dawson Adams Building) is reserved for the lunch hours on the schedule.



The ISS Silicon Microfabrication Workshop is open to to all, but as registration is limited, priority will be given to students whose ISS Program Plans indicated participation in the Microfabrication Workshop for 2014-2015 and students with impending graduation. Course fees will be reimbursed for current ISS students at their home universities.

The workshop costs $600 plus taxes for all non-ISS students.  This covers the lecture, materials and supplies, lab time and lunch on Monday, Thursday and Friday.

PLEASE NOTE: Cancellations requests must be made by 5:00 p.m. on Friday, May 1, 2015 for reimbursement (unless a medical note is provided).

Registration will close on May 1, 2015.

To register click here.