Génie chimique : Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environmental applications, nanoparticle synthesis, spraying and sterilization are treated.
Terms: Automne 2019
Instructors: Coulombe, Sylvain; Meunier, Jean-Luc (Fall)