CHEE 543 Plasma Engineering (3 unités)

Offered by: Génie chimique (Génie et l'architecture)

Vue d'ensemble

Génie chimique : Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environmental applications, nanoparticle synthesis, spraying and sterilization are treated.

Terms: Automne 2019

Instructors: Coulombe, Sylvain; Meunier, Jean-Luc (Fall)

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