Chemical Engineering : Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environmental applications, nanoparticle synthesis, spraying and sterilization are treated.
Terms: This course is not scheduled for the 2018-2019 academic year.
Instructors: There are no professors associated with this course for the 2018-2019 academic year.