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About Us

The McGill Nanotools Microfabrication Facility is a state-of-the-art micro/nanomachining facility that enables world-leading multidisciplinary and inter-disciplinary research in nanoscience, microtechnology, and the life sciences.

Since its inauguration in 2003, the facility has served more than 120 annual users, providing access, training, process development, and contract services for research and prototyping within a wide range of disciplines and applications.

Available to local, national, and international researchers, the 1,000 sq.ft facility features a class-100 cleanroom that is equipped with more than 40 standard semiconductor fabrication tools. In addition to the standard 4"/100mm wafer production capacity found in most university facilities, the McGill Microfab toolset is entirely 6"/150mm-compatible, allowing for small-volume prototyping at modest cost.

The McGill Nanotools Microfab project was initiated by a Canadian Foundation of Innovation (CFI) grant obtained by a group of researchers at McGill in 2000. To ensure the facility, meets/exceeds the needs of the people, it is upgraded as needed, with funding from CFI, Quebec, the Canadian Federal Government, and McGill University. Investments to date exceed 50M. Our operations are sustained by the fees collected for fab usage and by direct support from McGill University.

The McGill Nanotools Micro and Nanofabrication Facility (Nanotools) is a shared facility serving academic, industrial, and government researchers in micro- and nano-technology. As a fee-based, open-access facility, we welcome all research and development initiatives related to nano and microfabrication.

Our Mission

Our mission is to provide effective and efficient access to a broad range of micro- and nano-fabrication tools and expertise.

Our goals are:

  • Enable cutting edge research and technology by providing nano- and microfabrication access and services.

  • Train students in state-of-the-art nano- and microfabrication methods.

  • Develop and maintain know-how to install, repair and maintain all the equipment, to provide reliable access to nano- and microfab tools.

  • Develop, document and share baseline processes to fab members and the micro- and nano-technology community.

  • Develop a community of users from different disciplines, interested in or needing nano- and microfabrication.

  • Support and enable research initiatives.

  • Provide services and expertise to industry, including direct access for their personnel, to our facility.

Our Staff

The McGill Nanotools Micro and Nanofabrication Facility is run by 4, full-time staff, under the direction of Fab Manager, Dr Zhao Lu. The overall direction of the facility is managed by the Scientific Director, Prof. Peter Grutter, who is supported by an Advisory Committee.


McGill Nanotools Microfab
Rutherford Physics Building
3600 university St.
Montréal, QC H3A 2T8

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