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CHEE 587 Chemical Processing: Electronics Industry (3 credits)

Offered by: Chemical Engineering (Faculty of Engineering)


Chemical Engineering : Introduction to semiconductors and elementary semiconductor devices. Chemical processes and unit operations in the manufacture of microelectronic components with emphasis on silicon chip fabrication, fundamentals of crystal growth, photolithography, deposition of thin films, dopant diffusion, plasma and chemical etching, packaging. Safety and environmental concerns. Sustainability practices in this industry.

Terms: Fall 2014

Instructors: Dimitrios Berk (Fall)

  • (3-0-6)
  • Prerequisites: CHEE 310, CHEE 315, and CHEE 380, or equivalent courses, or instructor permission.