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CHEE 543 Plasma Engineering (3 credits)

Offered by: Chemical Engineering (Faculty of Engineering)

Overview

Chemical Engineering : Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environmental applications, nanoparticle synthesis, spraying and sterilization are treated.

Terms: Fall 2012

Instructors: Sylvain Coulombe, Jean-Luc Meunier, Pierre-Luc Girard-Lauriault (Fall)