Capabilities

The McGill Nanotools - Microfab is a 150mm compatible lab. It is equipped with standard and specialized Micro and Nanofabrication equipments.

Lithography

  • Contact Broadband UV
  • Electron Beam Litho
  • UV laser maskless direct write
  • Thermal Probe AFM Lithography

Thin films

  • LPCVD Nitride and PolySilicon
  • Thermal Oxides
  • Ebeam Evaporator
  • DC and RF sputterer
  • Spin and spray coater
  • Atomic layer deposition
  • Parylene coater

Etching

  • DRIE
  • RIE (HBr, Cl2, CF4, CHF3, SF6, O2, Ar...)
  • ICP for III, IV (installing)
  • XeF2 isotropic etch
  • HF wet bench
  • Acid/Base wet bench
  • KOH/TMAH wet bench
  • Solvent wet bench

Packaging and Assembly:

  • Wafer bonder (Anodic, Direct, Adhesive Eutectic)
  • Dicing saw
  • Polisher
  • Laminator
  • WireBonder

Characterization

  • Spectroscopic Ellipsometry
  • White light interferometer
  • Optical microscopes
  • Reflectometers
  • Stress measurement
  • Sheet resistance
  • Probe station
  • Stylus Profilometer
  • AFM
  • SEM