Event
The ISS Program is pleased to announce a hands-on workshop on the Microfabrication of Silicon-Based MEMS Devices to be held:
at McGill University between May 6-10, 2013 with a flexible schedule for hands-on components.
The 2-day workshop will be taught by Dr. Jun Li and Dr. Lino Eugene of the NanoTools Microfabrication Facility and Professor Xinyu Liu of the Department of Mechanical Engineering, McGill University, and will introduce students to the methodologies and techniques used for designing and microfabricating silicon-based MEMS (micro-electro-mechanical systems) devices.
Workshop Summary:
Silicon-based MEMS devices have found important applications in a large number of high-value sectors: aerospace and automotive transport, energy, customer electronics, communications, and medical devices. Motivated by such needs and opportunities, many academic institutions and industrial companies have invested enormous efforts on the research and development of integrated MEMS devices (both sensors and actuators) with superior functionalities, performance, and reliability. While translating design concepts into working prototypes, it is necessary to confront technological challenges in microfabrication process design, device packaging, and system integration. This course will introduce MEMS design and microfabrication methodologies, and provide hands-on experience in the NanoTools Microfabrication Facility.
This course should be of interest to students who intend to design and fabricate integrated MEMS platforms.
Registration is limited, so please reserve your space. Priority will be given to ISS Students.